Simplicity 830 Manuel d'utilisateur télécharger pdf

830 Vacuum Quality Monitor System

Product Highlights

• 1–135 amu total and partial

pressure measurement

information in 85 ms

• Instant information:

10 most prevalent gases

in normalized, percentage

and absolute, total

pressure & partial pressure

trend graphs

• Accurate hydrogen and

helium measurements (no

zero blast)

• Data logging at 85 ms

sample rates

• Easy single-gas calibration

using a gas already in

your vacuum system

• Low power - only 15 W

• Compact design and

remotely mounted gauge

using a 1-meter or 3-meter

long cable

www.brooks.com

FROM THE GRANVILLE-PHILLIPS

PORTFOLIO

Simplicity Solutions

™

by Granville-Phillips

combines the

highest performance gas analysis technology with intelligent

functional design that transforms complex measurement into

actionable information. The Simplicity Solutions 830 Vacuum

Quality Monitor (VQM

™

) system is the world’s fastest, lowest

power, gas compositional analysis instrument with full data

collection, spectral deconvolution, and data logging at 85 ms

capture rates over the full 1–135 amu measurement range.

In any vacuum system, it is critical to know the vacuum pressure. In many cases, it can be

just as important to know the composition of the gases in the system.

The 830 VQM is a mass spectrometer that operates from UHV to 10

-5

Torr and accurately

measures gases in the 1–135 amu range. The system consists of an autoresonant ion trap

mass spectrometer gauge, a VQM Controller and VQM Viewer software that converts

raw data to actionable information. The system is ratiometric, meaning that it determines

the ratio of each gas to other gases in a vacuum chamber. It is usually coupled with a total

pressure gauge to provide partial pressures of each gas which provides an indication of the

quality of the gas in a chamber.

Out-of-the-box you see your 10 most prevalent gases, total pressure trending, partial

pressure trending, spectral display, data logging, data (screen) capture, gas ﬁ tting library for

10 gases, and leak check – all at the 85 ms sampling rate. The Controller and Gauge system

requires only 15 watts to operate and offers the ﬂ exibility to remotely mount the 830 VQM

Gauge using a 1-meter or 3-meter long cable.

A Revolutionary Approach

Simplicity Solutions introduces the next generation mass separation technology based on

the electrostatic ion trap which:

• scans more than 20 times faster

• requires 80% less power

• calibrates dramatically faster

• accurately represents low masses

• and is signiﬁ cantly smaller

than legacy quadrupole or

magnetic-sector technologies.

6450 Dry Creek Pkwy | Longmont, CO 80503 USA | Tel: (303) 652-4400 | Fax: (303) 652-2844 | www.brooks.com

and GUTS

are registered trademarks of Brooks Automation, Inc.

Simplicity Solutions

, VQM

, and Vacuum Quality Monitor

are trademarks of Brooks Automation, Inc.

All other trademarks and registered trademarks are the properties of their respective owners.

Backed by Guts

With Simplicity Solutions, you get more than rugged, reliable, and high-performance instruments. You get an

exceptional end-to-end customer experience – from hassle-free sales and delivery through connect-and-go equipment

installation, to responsive worldwide service and support. The Simplicity Solutions 830 VQM system is backed by

global Sales, Service, and Support teams, including GUTS (Guaranteed Uptime Support) emergency support.

When you call a GUTS Service Center you are guaranteed immediate response by a vacuum

expert from our worldwide technical support staff. We are at work for you 24 hours a day,

365 days year at +1-800-FOR GUTS (+1-800-367-4887).

QMS100217-3 4/11

Ordering Information

SIMPLICITY SOLUTIONS

830 VQM Mass Spectrometer Gauge Controller

Description Catalog Number

Controller, Single Gauge, Benchtop, USB 2.0, 1–135 AMU . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 830501-U1-0

Universal Power Supply for 830 Controller, AC to 24 Vdc, with power cord . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 801201-#

(

)

Cables, Controller-to-Gauge

1 meter (3.28 ft) . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 830301-0010

3 meters (9.84 ft) . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 830301-0030

Cable, for log/linear analog output (1/8” miniature phone jack) from a G-P Ion Gauge Controller . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 801202-0100

(such as a Series 370 Stabil-Ion) to the analog input (BNC) on the 830 VQM Controller, 10 meters (32.81 ft)

CD, 830 Viewer Application Software . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 830251

Note: The User Manual can be downloaded at no charge from the Brooks.com website.

830 VQM Mass Spectrometer Gauge

830 Gauge, 1-135 AMU, Channel Electron Multiplier Detector, Yttria-coated Iridium ﬁ lament, 2.75-inch (NW35CF)

Nude . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 830100-NYG

Demountable Envelope . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 830100-DYG

Demountable Envelope (Nipple) for Nude Gauge, 2.75 inch (NW35CF) ﬂ ange, includes port screen . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 801270

T-Flange, 2.75 inch (NW35CF) ﬂ anges . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 801272

Hardware/Bolt Kit, includes 6 ﬂ ange bolts and washers, 3 plate nuts, and 1 copper gasket . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 801274-1

Wrench, 1/4”, 12 pt. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 801275

Field Replaceable Filament Assembly Kit. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 830105-Y-K

Heater Jacket, 120 Vac, with power cord . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 801203-1

Heater Jacket, 240 Vac, with power cord . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 801204-#

(

)

Rebuild Service, Replacement of Electron Multiplier and Filament . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 830107-E

(

)

# -1 = North American 115 Vac & Japan 100Vac , -2 = North American 240 Vac, -3 = Universal European 220 Vac, -4 = United Kingdom 240 Vac

802 VQM Total Pressure Measurement Gauge

Total Pressure Kit for Absolute & Ratiometric Pressure, 10

-9

to ATM, RS-485, .........................................................................................390802-2-YG-T

dual Yttria-coated Iridium ﬁ laments, gauge ﬁ lament protection, digital display with

total pressure, 2.75-inch (NW35CF) ConFlat-type ﬁ tting, Torr

Cables, 830 VQM Controller to Micro-Ion ATM Module

1 meter (3.28 ft) .................................................................................................................................................................................... 802301-0010

3 meters (9.84 ft) ................................................................................................................................................................................... 802301-0030

1 2 3 4 5 6 7 8

Résumé du contenu

Page 1 - Product Highlights

830 Vacuum Quality Monitor System Product Highlights• 1–135 amu total and partial pressure measurement information in 85 ms• Instant information: 10

Page 2 - 830 VQM Technology and Uses

SIMPLICITY SOLUTIONSField Replaceable Filament AssemblyThe ﬁ lament is very easy to replace by your own service technicians. A ﬁ lament replacement ki

Page 3 - 830 VQM System Beneﬁ ts

830 VQM System Beneﬁ ts830 VQM Controller Speciﬁ cationsParameter Speciﬁ cationMass Range/Scan Time 1–135 amu in 85 msInputs and Outputs: 390802 To

Page 4 - SIMPLICITY SOLUTIONS

Easy to CalibrateThe VQM System is very easy to calibrate using any gas (1–135 amu) already in the vacuum chamber. Simply select the gas you want to u

Page 5

Easy to CalibrateThe VQM System is very easy to calibrate using any gas (1–135 amu) already in the vacuum chamber. Simply select the gas you want to u

Page 6

830 VQM System Beneﬁ ts830 VQM Controller Speciﬁ cationsParameter Speciﬁ cationMass Range/Scan Time 1–135 amu in 85 msInputs and Outputs: 390802 To

Page 7

SIMPLICITY SOLUTIONSField Replaceable Filament AssemblyThe ﬁ lament is very easy to replace by your own service technicians. A ﬁ lament replacement ki

Page 8

830 Vacuum Quality Monitor System Product Highlights• 1–135 amu total and partial pressure measurement information in 85 ms• Instant information: 10